Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11143956 | Ejection device and imprint apparatus | Noriyasu Hasegawa, Ken Katsuta | 2021-10-12 |
| 11097545 | Liquid ejection device, cleaning apparatus and cleaning method for module substrate | Akiko Iimura, Noriyasu Hasegawa, Masahiro Kuri | 2021-08-24 |
| 10948836 | Liquid dispensing apparatus measuring condition of liquid and method of controlling the same, and imprint apparatus | Yuichi Takahashi | 2021-03-16 |