Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11171028 | Indexable side storage pod apparatus, heated side storage pod apparatus, systems, and methods | — | 2021-11-09 |
| 10903102 | Methods for purging a substrate carrier at a factory interface | Subramaniam V. Iyer, Dharma Ratnam Srichurnam, Devendrappa Holeyannavar, Douglas MacLeod, Kenneth Carpenter +2 more | 2021-01-26 |