Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 10903102 | Methods for purging a substrate carrier at a factory interface | Subramaniam V. Iyer, Dharma Ratnam Srichurnam, Douglas MacLeod, Kenneth Carpenter, Naveen Kumar +2 more | 2021-01-26 | $35,448,000 |