Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11150560 | Projection system and mirror and radiation source for a lithographic apparatus | Marcus Adrianus Van De Kerkhof, Anton Bernhard Van Oosten, Hans Butler, Erik Roelof Loopstra, Koen Jacobus Johannes Maria Zaal | 2021-10-19 |