Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11112700 | Optimization of a lithographic projection apparatus accounting for an interlayer characteristic | Wim Tjibbo Tel, Laurent Michel Marcel Depre | 2021-09-07 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11112700 | Optimization of a lithographic projection apparatus accounting for an interlayer characteristic | Wim Tjibbo Tel, Laurent Michel Marcel Depre | 2021-09-07 |