Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10908510 | Imprint lithography | Catharinus De Schiffart, Michael Jozef Mathijs Renkens, Gerard Van Schothorst, Andre Bernardus Jeunink, Gregor Edward Van Baars +5 more | 2021-02-02 |
| 10904994 | Supply system for an extreme ultraviolet light source | Koen Gerhardus Winkels, Georgiy O. Vaschenko, Theodorus Wilhelmus Driessen, Bastiaan Lambertus Wilhelmus Marinus Van De Ven, Wilhelmus Henricus Theodorus Maria Aangenent | 2021-01-26 |
| 10890851 | Imprint lithography | Catharinus De Schiffart, Michael Jozef Mathijs Renkens, Gerard Van Schothorst, Andre Bernardus Jeunink, Gregor Edward Van Baars +5 more | 2021-01-12 |