Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10904994 | Supply system for an extreme ultraviolet light source | Koen Gerhardus Winkels, Georgiy O. Vaschenko, Theodorus Wilhelmus Driessen, Johan Frederik Dijksman, Wilhelmus Henricus Theodorus Maria Aangenent | 2021-01-26 |