Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11201075 | Holding apparatus for electrostatically holding a component, including a base body joined by diffusion bonding, and process for its manufacture | Stefan Hoescheler, Marcel Ziemann, Carsten Pampuch | 2021-12-14 |