Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11201075 | Holding apparatus for electrostatically holding a component, including a base body joined by diffusion bonding, and process for its manufacture | David Kieven, Marcel Ziemann, Carsten Pampuch | 2021-12-14 |
| 10987760 | Method of manufacturing a holding plate, in particular for a clamp for holding wafers | Ralf Hammer, Mike Fischer, Gregor Hasper | 2021-04-27 |