Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11107676 | Method and apparatus for filling a gap | Viljami Pore, Bert Jongbloed, Dieter Pierreux, Gido Van Der Star, Toshiya Suzuki | 2021-08-31 |
| 11088002 | Substrate rack and a substrate processing system and method | Dieter Pierreux, Bert Jongbloed, Cornelis Thaddeus Herbschleb, Hessel Sprey | 2021-08-10 |
| 11056353 | Method and structure for wet etch utilizing etch protection layer comprising boron and carbon | Dieter Pierreux, Bert Jongbloed | 2021-07-06 |