Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11069514 | Remote capacitively coupled plasma source with improved ion blocker | Vivek Shah, Bhaskar Kumar, Ganesh Balasubramanian | 2021-07-20 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11069514 | Remote capacitively coupled plasma source with improved ion blocker | Vivek Shah, Bhaskar Kumar, Ganesh Balasubramanian | 2021-07-20 |