Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 11120976 | Apparatus and methods for removing contaminant particles in a plasma process | Anup K. Singh, Vivek Shah, Sidharth Bhatia, Ganesh Balasubramanian | 2021-09-14 | $84,054,000 |
| 11069514 | Remote capacitively coupled plasma source with improved ion blocker | Vivek Shah, Vinayak Vishwanath Hassan, Ganesh Balasubramanian | 2021-07-20 | $88,311,000 |
| 10892143 | Technique to prevent aluminum fluoride build up on the heater | Vivek Shah, Anup K. Singh, Ganesh Balasubramanian | 2021-01-12 | $84,921,000 |