Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11120976 | Apparatus and methods for removing contaminant particles in a plasma process | Anup K. Singh, Vivek Shah, Sidharth Bhatia, Ganesh Balasubramanian | 2021-09-14 |
| 11069514 | Remote capacitively coupled plasma source with improved ion blocker | Vivek Shah, Vinayak Vishwanath Hassan, Ganesh Balasubramanian | 2021-07-20 |
| 10892143 | Technique to prevent aluminum fluoride build up on the heater | Vivek Shah, Anup K. Singh, Ganesh Balasubramanian | 2021-01-12 |