Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 11180849 | Direct liquid injection system for thin film deposition | Subramanya P. HERLE, Basavaraj Pattanshetty, Ajay Balaram MORE, Marco Mohr, Bjoern Sticksel-Weis +2 more | 2021-11-23 | $124,354,000 |