SH

Subramanya P. HERLE

Applied Materials: 5 patents #93 of 1,395Top 7%
Overall (2021): #27,311 of 548,734Top 5%
5
Patents 2021

Issued Patents 2021

Patent #TitleCo-InventorsDate
11185915 Deposition of reactive metals with protection layer for high volume manufacturing 2021-11-30
11180849 Direct liquid injection system for thin film deposition Vicente Lim, Basavaraj Pattanshetty, Ajay Balaram MORE, Marco Mohr, Bjoern Sticksel-Weis +2 more 2021-11-23
10978699 Integrated lithium deposition with protective layer tool Dieter Haas 2021-04-13
10944103 Ex-situ solid electrolyte interface modification using chalcogenides for lithium metal anode Girish Kumar GOPALAKRISHNAN NAIR, Karl J. Armstrong 2021-03-09
10916761 Low melting temperature metal purification and deposition Bernard Frey, Dieter Haas 2021-02-09