Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11024522 | Virtual sensor for spatially resolved wafer temperature control | Hemant P. Mungekar, Ganesh Balasubramanian | 2021-06-01 |
| D906923 | Wheel or wheel cover | Achim-Dietrich Badstuebner, Carsten Guenther, Robert Lesnik, Peter Riedel, Gorden Wagener | 2021-01-05 |