Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11024522 | Virtual sensor for spatially resolved wafer temperature control | Uwe Haller, Ganesh Balasubramanian | 2021-06-01 |
| 11004710 | Wafer placement error detection based on measuring a current through an electrostatic chuck and solution for intervention | Ganesh Balasubramanian | 2021-05-11 |