Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10983441 | Resolution enhanced digital lithography with anti-blazed DMD | Hwan J. Jeong | 2021-04-20 |
| 10935890 | Half tone scheme for maskless lithography | Christopher Dennis Bencher, Joseph R. Johnson | 2021-03-02 |
| 10935892 | Freeform distortion correction | Tamer Coskun, Jang Fung Chen | 2021-03-02 |
| 10921714 | Reserving spatial light modulator sections to address field non-uniformities | Joseph R. Johnson, Christopher Dennis Bencher | 2021-02-16 |