Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10994991 | Method to reduce pore diameter using atomic layer deposition and etching | Kenichi Ohno | 2021-05-04 |
| 10983444 | Systems and methods of using solid state emitter arrays | Christopher Dennis Bencher | 2021-04-20 |
| 10935890 | Half tone scheme for maskless lithography | Christopher Dennis Bencher, Thomas Laidig | 2021-03-02 |
| 10921714 | Reserving spatial light modulator sections to address field non-uniformities | Thomas Laidig, Christopher Dennis Bencher | 2021-02-16 |