Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11094647 | Methods and apparatus to eliminate wafer bow for CVD and patterning HVM systems | Lin Zhang, Joseph C. Werner | 2021-08-17 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11094647 | Methods and apparatus to eliminate wafer bow for CVD and patterning HVM systems | Lin Zhang, Joseph C. Werner | 2021-08-17 |