Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11094647 | Methods and apparatus to eliminate wafer bow for CVD and patterning HVM systems | Shuran Sheng, Lin Zhang | 2021-08-17 |
JW
Joseph C. Werner
Overall (2021): #390,550 of 548,734Top 75%
1
Patents 2021