Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 11067905 | Real-time autofocus for maskless lithography on substrates | Diana Valverde-Paniagua, Zhongchuan Zhang, Zheng Gu, Meenaradchagan Vishnu, Glen Gomes | 2021-07-20 | $88,311,000 |