Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11049704 | Cleanliness monitor and a method for monitoring a cleanliness of a vacuum chamber | Irit Ruach-Nir, Guy Eytan, Magen Yaacov Schulman, Sven Ruhle, Manuel Radek +1 more | 2021-06-29 |
| 10910204 | Cleanliness monitor and a method for monitoring a cleanliness of a vacuum chamber | Irit Ruach-Nir, Guy Eytan, Magen Yaacov Schulman | 2021-02-02 |