Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11049704 | Cleanliness monitor and a method for monitoring a cleanliness of a vacuum chamber | Irit Ruach-Nir, Michal Eilon, Guy Eytan, Sven Ruhle, Manuel Radek +1 more | 2021-06-29 |
| 10910204 | Cleanliness monitor and a method for monitoring a cleanliness of a vacuum chamber | Irit Ruach-Nir, Michal Eilon, Guy Eytan | 2021-02-02 |