Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11022565 | Process monitoring | Eugene T. Bullock, Adi Boehm, Gurjeet Singh | 2021-06-01 |
| 10928336 | X-ray based evaluation of a status of a structure of a substrate | — | 2021-02-23 |
| 10922809 | Method for detecting voids and an inspection system | Vadim Kuchik, Nicolas L. Breil | 2021-02-16 |