Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11152223 | Fluorocarbon molecules for high aspect ratio oxide etch | Curtis Anderson, Rahul Gupta, Vincent M. Omarjee, Christian Dussarrat | 2021-10-19 |
| 11024513 | Methods for minimizing sidewall damage during low k etch processes | Chih-Yu Hsu, Peng Shen | 2021-06-01 |