Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11152223 | Fluorocarbon molecules for high aspect ratio oxide etch | Rahul Gupta, Vincent M. Omarjee, Nathan Stafford, Christian Dussarrat | 2021-10-19 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11152223 | Fluorocarbon molecules for high aspect ratio oxide etch | Rahul Gupta, Vincent M. Omarjee, Nathan Stafford, Christian Dussarrat | 2021-10-19 |