Issued Patents 2021
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11141762 | System for cleaning semiconductor wafers | Hui Wang, Fufa Chen, Fuping Chen, Jian Wang, Xi Wang +5 more | 2021-10-12 |
| 11103898 | Methods and apparatus for cleaning substrates | Hui Wang, Xi Wang, Fuping Chen, Fufa Chen, Jian Wang +4 more | 2021-08-31 |
| 11037804 | Methods and apparatus for cleaning substrates | Hui Wang, Xi Wang, Fuping Chen, Fufa Chen, Jian Wang +4 more | 2021-06-15 |
| 11008669 | Apparatus for holding a substrate | Hui Wang, Hongchao Yang, Jun Wu, Jian Wang | 2021-05-18 |
| 10910244 | Methods and system for cleaning semiconductor wafers | Hui Wang, Fufa Chen, Fuping Chen, Jian Wang, Xi Wang +5 more | 2021-02-02 |