Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11141762 | System for cleaning semiconductor wafers | Hui Wang, Fuping Chen, Jian Wang, Xi Wang, Xiaoyan Zhang +5 more | 2021-10-12 |
| 11103898 | Methods and apparatus for cleaning substrates | Hui Wang, Xi Wang, Fuping Chen, Jian Wang, Xiaoyan Zhang +4 more | 2021-08-31 |
| 11037804 | Methods and apparatus for cleaning substrates | Hui Wang, Xi Wang, Fuping Chen, Jian Wang, Xiaoyan Zhang +4 more | 2021-06-15 |
| 10910244 | Methods and system for cleaning semiconductor wafers | Hui Wang, Fuping Chen, Jian Wang, Xi Wang, Xiaoyan Zhang +5 more | 2021-02-02 |