Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10770324 | Substrate holding device, substrate transport device, processing arrangement and method for processing a substrate | Robert Kuenanz, Jens Melcher, Georg Laimer, Erwin Zschieschang, Bjoern Hornbostel | 2020-09-08 |