Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10794763 | Fiberoptically-coupled measurement system with reduced sensitivity to angularly-driven variation of signals upon reflection from a wafer | John D. Corless | 2020-10-06 |
| 10679832 | Microwave plasma source | — | 2020-06-09 |