Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10609802 | High-temperature plasma raw material supply apparatus and extreme ultra violet light source apparatus | Daiki Yamatani | 2020-03-31 |
| 10591342 | Liquid level detection device, method of detecting liquid level, high temperature plasma raw material supply device and extreme ultra violet light source device | Gota Niimi | 2020-03-17 |