Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10768531 | System and method of maskless lithography with the use of a curvilinear hologram | Vitaly Chernik, Mikhail Borisov, Aleksey Shamaev, Dmitry Chelyubeev | 2020-09-08 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10768531 | System and method of maskless lithography with the use of a curvilinear hologram | Vitaly Chernik, Mikhail Borisov, Aleksey Shamaev, Dmitry Chelyubeev | 2020-09-08 |