Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10763817 | Characterization and driving method based on the second harmonic, which is enhancing the quality factor and reducing the feedthrough current in varying gap electrostatic MEMS resonators | Haluk Kulah, Ozge Zorlu, Mustafa Kangul, Furkan Gokce | 2020-09-01 |