Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10648076 | Cleaning method and film deposition apparatus executing the cleaning method for uniformly cleaning rotary table | Takahito Umehara | 2020-05-12 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10648076 | Cleaning method and film deposition apparatus executing the cleaning method for uniformly cleaning rotary table | Takahito Umehara | 2020-05-12 |