Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10663040 | Method and precision nanopositioning apparatus with compact vertical and horizontal linear nanopositioning flexure stages for implementing enhanced nanopositioning performance | Deming Shu, Barry Lai, Steven P. Kearney, Wenjun Liu, Jorg M. Maser +2 more | 2020-05-26 |