Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10840065 | Active gas generation apparatus including a metal housing, first and second auxiliary members, and a housing contact | Yoshihito Yamada, Shinichi Nishimura | 2020-11-17 |
| 10793953 | Activated gas generation apparatus and film-formation treatment apparatus | Shinichi Nishimura, Yoichiro Tabata | 2020-10-06 |
| 10676825 | Gas jetting apparatus for film formation apparatus | Yoichiro Tabata, Shinichi Nishimura | 2020-06-09 |