Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10854488 | Wafer conveying apparatus and wafer conveying method | Fumiki Aiso, Ryota Fujitsuka, Kensei Takahashi, Takayuki Matsui | 2020-12-01 |
| 10669621 | Vaporization system | Fumiki Aiso, Hajime Nagano, Kensei Takahashi | 2020-06-02 |