YF

Yoshikazu Furusawa

TL Tokyo Electron Limited: 2 patents #149 of 858Top 20%
Overall (2020): #104,569 of 565,922Top 20%
2
Patents 2020

Issued Patents 2020

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
10619247 Substrate processing apparatus, injector, and substrate processing method — 2020-04-14
10573518 Film forming method and vertical thermal processing apparatus — 2020-02-25