Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10541146 | Method of cyclic plasma etching of organic film using sulfur-based chemistry | Alok Ranjan | 2020-01-21 |
| 10535531 | Method of cyclic plasma etching of organic film using carbon-based chemistry | Alok Ranjan | 2020-01-14 |