TH

Tsutomu Hiroki

TL Tokyo Electron Limited: 2 patents #149 of 858Top 20%
Overall (2020): #111,451 of 565,922Top 20%
2
Patents 2020

Issued Patents 2020

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
10763764 Stage and substrate processing apparatus 2020-09-01
10658160 Stage and substrate processing apparatus 2020-05-19