Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10763139 | Vacuum transfer module and substrate processing apparatus | — | 2020-09-01 |
| 10748796 | Substrate processing apparatus | — | 2020-08-18 |
| 10586729 | Transfer device and control method thereof | Hiroshi Koizumi | 2020-03-10 |