Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10866017 | Condensation suppressing method and processing apparatus | Takuya Nishijima | 2020-12-15 |
| 10811234 | Plasma processing apparatus and upper electrode assembly | Jun Young Chung | 2020-10-20 |
| 10777435 | Substratre delivery method and substrate processing apparatus | — | 2020-09-15 |