ST

Satoshi Taga

TL Tokyo Electron Limited: 1 patents #306 of 858Top 40%
Overall (2020): #284,870 of 565,922Top 55%
1
Patents 2020

Issued Patents 2020

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
10557190 Substrate processing apparatus and susceptor Yoshiyuki Kobayashi 2020-02-11