Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10720312 | Substrate processing apparatus | Hiromi Nitadori | 2020-07-21 |
| 10550471 | Mixed gas multiple line supply system and substrate processing apparatus using same | Shinobu Kawamorita | 2020-02-04 |