OM

Osamu Miyahara

TL Tokyo Electron Limited: 1 patents #306 of 858Top 40%
Overall (2020): #324,537 of 565,922Top 60%
1
Patents 2020

Issued Patents 2020

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
10818521 Substrate processing apparatus, substrate processing method, and storage medium — 2020-10-27