Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10571900 | Method and apparatus for autonomous tool parameter impact identification system for semiconductor manufacturing | Sanjeev Kaushal, Sukesh Janubhai Patel, Wolfgang Polak, Aaron Archer Waterman | 2020-02-25 |