Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10867815 | Photonically tuned etchant reactivity for wet etching | Paul Abel | 2020-12-15 |
| 10818512 | Photo-assisted chemical vapor etch for selective removal of ruthenium | Jacques Faguet | 2020-10-27 |