Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10837902 | Optical sensor for phase determination | Ivan Maleev, Hanyou Chu, Ching-Ling Meng, Qionglin Gao, Yan Chen +1 more | 2020-11-17 |
| 10692705 | Advanced optical sensor and method for detecting an optical event in a light emission signal in a plasma chamber | Xinkang Tian, Ching-Ling Meng, Jason Ferns, Joel Ng, Badru D. Hyatt +2 more | 2020-06-23 |