Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10815568 | Gas distribution device and processing apparatus | Takumi Kabe | 2020-10-27 |
| 10665428 | Plasma processing apparatus | Naoki Matsumoto | 2020-05-26 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10815568 | Gas distribution device and processing apparatus | Takumi Kabe | 2020-10-27 |
| 10665428 | Plasma processing apparatus | Naoki Matsumoto | 2020-05-26 |