Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10734205 | Cleaning method and plasma processing apparatus | Mitsuhiro Iwano | 2020-08-04 |
| 10529583 | Etching method | Mitsuhiro Iwano | 2020-01-07 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10734205 | Cleaning method and plasma processing apparatus | Mitsuhiro Iwano | 2020-08-04 |
| 10529583 | Etching method | Mitsuhiro Iwano | 2020-01-07 |